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INFICON BCG450 ATM to Ultra-High Vacuum Triple Gauge User Manual

Page 5

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tina40e1-b (2011-04)

5

6

Maintenance, Repair

45

6.1

Maintenance 45

6.1.1

Cleaning the Gauge

45

6.2

Adjusting the Gauge

45

6.3

Adjusting the Atmosphere Sensor

45

6.4

What to Do in Case of Problems

47

6.5

Replacing the Sensor

49

7

Options 50

8

Spare Parts

50

9

Storage 50

10

Returning the Product

51

11

Disposal 51

Appendix 52

A:

Relationship Measuring Signal – Pressure

52

B:

Gas Type Dependence

53

C:

Literature 55

Declaration of Contamination

56



For cross-references within this document, the symbol (

→ XY) is used, for cross-

references to further documents and data sources, the symbol (

→ [Z]).