INFICON BCG450 ATM to Ultra-High Vacuum Triple Gauge - Manual (Page 53)

tina40e1-b (2011-04)
53
Pressure indicated (gauge adjusted for air)
10 2
8
6
4
2
10 1
8
6
4
2
10 0
8
6
4
2
10 –1
8
6
4
2
10 –2
8
6
4
2
10 –3
10 –4 2 4 6 10 –3 2 4 6 10 –2 2 4 6 2 4 6 10 0 2 4 6 10 1 10 –1
10 –4
p
eff
[mbar]
2 4 6 10 2 2 4 6 10 3
8
6
4
2
10 3
p [mbar]
8
6
4
2
4
2
2
Air, O
2
, CO, N
2
He
Ar
Pirani
sensor
Cross-
over
range
Capacitance
diaphragm
sensor
B: Gas Type Dependence
Indication range
above 10
-2 mbar