Functional principle trademarks – INFICON BCG450 ATM to Ultra-High Vacuum Triple Gauge User Manual
Page 3
tina40e1-b (2011-04)
3
Due to the combination of three sensor technologies incorporated in the gauge
(Capacitance diaphragm sensor, Pirani sensor and hot cathode ionisation sensor
(BA)), a minimized gas type dependence is achieved.
Between 10 mbar and atmospheric pressure, the capacitance diaphragm sensor
operates without any gas type dependence. Below 1 mbar, the Pirani sensor and
the hot cathode ionisation sensor take over with only a small gas type dependence.
Between 1 … 10 mbar and 5Ч10
-3
… 2Ч10
-2
mbar the gauges built in electronic
circuits take care of continuous and smooth crossovers between the ranges. Over
the whole measurement range, the measurement signal is output as a logarithm of
the pressure.
The hot cathode is switched on by the Pirani measurement system only below the
switching threshold of 2.4×10
-2
mbar (to prevent filament burn-out). It is switched
off when the pressure exceeds 3.2×10
-2
mbar.
Gauge adjustment is carried out automatically, no manual adjustment is required.
A user programmable atmospheric pressure switching function is incorporated.
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