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5 deinstallation, Procedure – INFICON BCG450 ATM to Ultra-High Vacuum Triple Gauge User Manual

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tina40e1-b (2011-04)

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5 Deinstallation

DANGER

DANGER: contaminated parts
Contaminated parts can be detrimental to health and environment.
Before beginning to work, find out whether any parts are contami-
nated. Adhere to the relevant regulations and take the necessary
precautions when handling contaminated parts.

Caution

Caution: vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to
ensure cleanliness and prevent damages.

Caution

Caution: dirt sensitive area
Touching the product or parts thereof with bare hands increases the
desorption rate.
Always wear clean, lint-free gloves and use clean tools when working
in this area.

Vent the vacuum system.

Before taking the gauge out of operation, make sure that this has
no adverse effect on the vacuum system.
Depending on the programming of the superset controller, faults
may occur or error messages may be triggered.
Follow the appropriate shut-down and starting procedures.

Take gauge out of operation.

Disconnect all cables from the gauge.



Procedure