INFICON BCG450 ATM to Ultra-High Vacuum Triple Gauge - Manual (Page 52)

52
tina40e1-b (2011-04)
Appendix
p = 10 (U - 7.75) / 0.75 + c
U = 0.75 × (log p - c) + 7.75
where U p c
[V] [mbar] 0
[V] [Pa] 2
[V] [Torr] -0.125
1E+01
1E–01
1E–03
1E–05
1E–07
1E–09
1E+03
Measuring signal U[V]
0.0
1E+04
1E+02
1E+00
1E–02
1E–04
1E–06
1E–08
1E–10
1.0 2.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10.0
Pressure p [mbar]
Ina
dmi
ssi
bl
e r
ange
S
enso
r er
ror
Ina
dmi
ssi
bl
e r
ange
Output signal U
[V] [mbar]
Pressure p
[Torr] [Pa]
0.1 / 0.3 / 0.5 Sensor error ( → 47)
0.51 … 0.774 Inadmissible range
0.774 5Ч10 -10 3.75Ч10 -10 5Ч10 -8
1.00 1Ч10 -9 7.5Ч10 -10 1Ч10 -7
1.75 1Ч10 -8 7.5Ч10 -9 1Ч10 -6
2.5 1Ч10 -7 7.5Ч10 -8 1Ч10 -5
3.25 1Ч10 -6 7.5Ч10 -7 1Ч10 -4
4.00 1Ч10 -5 7.5Ч10 -6 1Ч10 -3
4.75 1Ч10 -4 7.5Ч10 -5 1Ч10 -2
5.50 1Ч10 -3 7.5Ч10 -4 1Ч10 -1
6.25 1Ч10 -2 7.5Ч10 -3 1Ч10 0
7.00 1Ч10 -1 7.5Ч10 -2 1Ч10 1
7.75 1Ч10 0 7.5Ч10 -1 1Ч10 2
8.50 1Ч10 1 7.5Ч10 0 1Ч10 3
9.25 1Ч10 2 7.5Ч10 1 1Ч10 4
10.00 1Ч10 3 7.5Ч10 2 1Ч10 5
>10.13 Inadmissible range
A: Relationship Measuring
Signal – Pressure
Conversion formulae
Conversion curve
Conversion table