INFICON Sensistor ILS500 Leak Detection System - Manual (Page 4)

Content 4
ninb63e1-f (1410)
9 Recipes 44
9.1 Recipe Overview 44
9.2 Create a Recipe 45
9.3 Test Settings 46
9.4 Optimizing the Test Cycle 53
10 Calibration 58
10.1 About Calibration 58
10.2 Calibration Overview 58
10.3 How to Calibrate 60
11 Troubleshooting 62
11.1 Fault Symptoms 62
11.2 Perform Hardware Test 62
12 Maintenance Instructions 75
12.1 Software Update 75
12.2 Maintenance Plan 76
12.3 Maintenance 77
12.4 Functional Verification 83
13 Service 84
14 Technical Data 85
14.1 Electrical Specifications 85
14.2 Pneumatic Specifications 86
14.3 Other Data 87
14.4 Interfaces and Connectors 88
15 Spare Parts and Accessories 99
16 Support from INFICON 101
16.1 How to Contact INFICON 101
16.2 Returning Components to INFICON 101
17 Declaration of Conformity 102
18 Declaration by the Manufacturer 103
Appendix
A: Parameter Index 104