Specifications -6, 8 typical application of upstream controller -6, 4 specifications warning – Brooks Instrument 5866M User Manual
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Brooks Instrument Model 5866 Pressure Controller
1-6
Valve Override permits the user to fully open and close the valve
independent of the command setting (refer to Section 2-9).
Precision +5 Volt Reference is provided to be used in conjunction with a
user supplied command potentiometer to generate a 0-5 V command
signal.
1-4 Specifications
WARNING
Do not operate this instrument in excess of the specifications listed
below. Failure to heed this warning can result in serious personal
injury and/or damage to the equipment.
Pressure Ranges
7.25 psia to 1450 psia full scale (Elastomer Seals)
7.25 psia to 72.5 psia full scale (Metal Seals)
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®
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Model 5866E
Reactor
Mass Flow
Controllers
Figure 1-8. Typical Application of Upstream Controller.
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