Brooks Instrument 5866M - Manual (Page 3)

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Brooks Instrument Model 5866 Mass Flow Controller
Section 6
Calibration
Page
Calibration Procedure .................................................................. 6-1
Gas Conversion Factors .............................................................. 6-2
Section 7
Parts List
General ........................................................................................ 7-1
Appendix A
CE Certification
CE Certification for Mass Flow Equipment ................................ A-1
Figures
1-1 Model 5866 Pressure Transducer ................................. 1-2
1-2 Model 5866 Silicon Chip Configuration ......................... 1-2
1-3 Model 5866 System Block Diagram .............................. 1-2
1-4 Model 5866 Dimensions ............................................... 1-3
1-5 Model 5866 Upstream Controller .................................. 1-4
1-6 Model 5866 Downstream Controller ............................. 1-4
1-7 Typical Application of Downstream Controller ............... 1-5
1-8 Typical Application of Upstream Controller ................... 1-6
2-1 Customer Connections and Settings ............................ 2-4
3-1 Error Signal Step Response ......................................... 3-1
3-2 Proportional Control ...................................................... 3-3
3-3 Integral Control ............................................................. 3-3
3-4 P.I. Control ..................................................................... 3-4
5-1 Torque Sequence for the Valve Retainer Plate ............. 5-6
5-2 Adjustment Test Setup .................................................. 5-7
5-3 Valve Adjusting Spacer Locations ................................. 5-9
5-4 Valve Adjusting Spacer Locations, Normally Open
(N.O.) Valve .................................................................. 5-11
5-5 Application Configuration ............................................. 5-12
5-6 Example Application of Orifice Sizing Procedure ........ 5-14
7-1 Model 5866E Parts Drawing ......................................... 7-2
7-2 Model 5866M Parts Drawing ......................................... 7-4
Tables
2-1 D-Connector Pin Arrangement ...................................... 2-5
5-1 Bench Troubleshooting .................................................. 5-3
5-2 Sensor Troubleshooting ................................................. 5-3
5-3 Minimum Flow Values .................................................. 5-10
5-4 Model 5866 Orifice Selection ....................................... 5-14
6-1 Conversion Factors ....................................................... 6-4
7-1 Model 5866E Parts List ................................................. 7-3
7-2 Troubleshooting Aids and Spare Parts Kit for
Model 5866 ................................................................... 7-3
7-3 Model 5866M Parts List ................................................ 7-5