Silicon chip (refer to figure 1-1), Ace (refer to figure 1-2), Wn in figure 1-3 – Brooks Instrument 5866M User Manual
Page 5
Brooks Instrument Model 5866 Pressure Controller
1-2
Figure 1-1. Model 5866 Pressure
Transducer.
Figure 1-2. Model 5866 Silicon Chip
Configuration.
Figure 1-3. Model 5866 System Block Diagram (Downstream version).
COMMAND
INPUT
VALVE
OVERRIDE
= OPTIONAL
Model 5866
VALVE
DRIVE
REMOTE
TRANSDUCER
INPUT
COMPARISON
AMPLIFIER
CONTROL
VALVE
5 VOLT
REFERENCE
VALVE
OVERRIDE
LOGIC
COMMAND
POT
PRESSURE
TRANSDUCER
®
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