Brooks Instrument 5866M - Manual (Page 62)

1
Addendum
April 5, 2004
Attach to the following publications:
X-5850EM, December 1998, Issue 3
X-5964, dated April 1996, Issue 2
X-5866, dated April 1998, Issue 2
X-5866RT, dated May 1998, Issue 2
Brooks ® TMF Common Body Dimensions
www.BrooksInstrument.com
Brooks ® Thermal Mass Flow
Common Body Dimensions
Issue
Dimensional drawings appearing in the above listed instruction manuals do not depict current body fitting configurations
being offered.
Action
The latest revision VCR body fitting configurations offer a modified mounting configuration adding the SEMI
standard mounting hole configuration and only one (1) of the legacy Brooks mounting holes.
When specifying any of the models listed below, please refer to the attached Figures A-1 thru A-2 for mounting
holes and Downport configuration information:
5850EMF
5964D
5866
5866RT