Model 5866 -3, Numbers in ( ) refer to figure 7-1, Table 7-1 f – Brooks Instrument 5866M User Manual
Page 46: Table 7-2 lists tools and par
7-3
Parts List
Table 7-1. Model 5866E Parts List.
Item
No.
Qty.
Description
Part Number
1
1
Jam Nut
573-B-027-ACK
2
1
Coil Assembly
S-185-Z-271-AAA
3
6
Valve/Transducer Screw
751-C-322-AWA
4
1
Retaining Plate
715-Z-169-CZ%
5
2 or 3 O-ring, Valve Stem,
375-B-016-***
Transducer, Size 016
6
1
Valve Stem, N.C.
949-Z-203-QOA
6A
1
Valve Plug, (w/o valve)
953-Z-068-BMT
6B
1
Backing Ring, (w/o valve)
763-Z-064-QTA
7
1
Plunger Assy, N.C.
S-622-Z-165-AAA
8
1 or 2 Lower Guide Spring
820-Z-083-BMA
9
AR
Small Valve Spacer, .005" TK
810-A-362-BMA
AR
Small Valve Spacer, .010" TK
810-A-363-BMA
10
AR
Large Valve Spacer, .005" TK
810-A-368-BMA
AR
Large Valve Spacer, .010" TK
810-A-361-BMA
11
1
Valve Seat w/Viton Insert
S-715-Z-051-AAG
Valve Seat w/Buna Insert
S-715-Z-050-AAG
Valve Seat w/Kalrez Insert
S-715-Z-163-AAA
Valve Seat w/Teflon Insert
S-715-Z-049-AAA
Valve Seat, Stainless Steel
715-Z-181-BNT
12
1
Orifice
Stainless
Hastelloy
TM
ID 0.0013" 577-Z-375-BMT 577-Z-404-CVA
ID 0.002"
577-Z-376-BMT 577-Z-405-CVA
ID 0.003"
577-Z-377-BMT 577-Z-406-CVA
ID 0.004"
577-Z-378-BMT 577-Z-407-CVA
(Refer
ID 0.007"
577-Z-381-BMT 577-Z-410-CVA
to
ID 0.010"
577-Z-383-BMT 577-Z-412-CVA
Section ID 0.014"
577-Z-385-BMT 577-Z-414-CVA
5-6
ID 0.020"
577-Z-387-BMT 577-Z-416-CVA
for
ID 0.032"
577-Z-391-BMT 577-Z-420-CVA
Sizing) ID 0.048"
577-Z-393-BMT 577-Z-422-CVA
ID 0.062"
577-Z-395-BMT 577-Z-424-CVA
ID 0.078"
577-Z-397-BMT 577-Z-426-CVA
ID 0.093"
577-Z-398-BMT 577-Z-427-CVA
ID 0.116"
577-Z-399-BMT 577-Z-428-CVA
ID 0.120"
577-Z-400-BMT 577-Z-429-CVA
Item
No.
Qty.
Description
Part Number
13
1 or 2 O-ring, Orifice, Size 008
375-B-008-***
14
1
Spacer, Nut, N.O. Valve
BV-810-A-326-CEA
15
1
Valve Stem, N.O. Valve
BV-839-Z-042-BMT
16
1
Plunger Assembly, N.O. Valve
BV-622-Z-118-AAA
17
1
Insert, Sleeve, N.O. Valve
BV-456-C-179-CEA
18
1
Plunger Ext., N.O. Valve
BV-622-Z-117-BMT
19
1
Spacer, Spring, N.O. Valve
BV-810-A-327-BMT
20
4
Screw, Downstream Control
751-C-343-ACZ
Adaptor
21
1
Downstream Control Adaptor
BV-019-Z-235-BMF
22
2
8-32 Mounting Screw
753-A-322-AWA
23
2
Fittings:
1/8" Compression, Swagelok
320-B-182-BMA
1/4" Compression, Swagelok
320-B-136-BMA
3/8" Compression, Swagelok
320-B-150-BMA
6mm Compression, Swagelok
320-Z-101-BMA
1/4" VCR
315-Z-036-BMA
3/8 or 1/2" VCR
315-Z-034-BMA
1/4" VCO
315-Z-035-BMA
3/8 or 1/2" VCO
315-Z-033-BMA
24
2
O-ring, Fitting
375-B-906-***
25
1
Controller Body
BV-092-B-095-BMT
26
1
Pressure Transducer, 0-1 Bar
BV-774-Z-001-GDE
Pressure Transducer, 0-5 Bar
BV-774-Z-002-GDE
Pressure Transducer, 0-20 Bar BV-774-Z-003-GDE
Pressure Transducer, 0-100 Bar BV-774-Z-004-GDE
27
1
Base Plate
BV-613-H-106-BMF
28
1
PC Board Mounting Bracket
079-Z-135-EAA
29
5
Screw, PC Board, Cover
753-L-056-AWZ
30
1
PC Board Assembly, 5866
097-B-190-ZZZ
31
1
Electronics Cover Can
219-Z-256-EAD
32
2
Pot Hole Plug
620-Z-434-SXA
33
2
Jack Post
760-Z-037-ACS
*** QTA= Viton, SUA= Buna, TTA= Kalrez
Table 7-2. Troubleshooting Aids and Spare Parts Kit for Model 5866E.
5850 Break Out Board Assembly
5850 Valve Shim Kit
P/N S-273-Z-668-AAA
P/N S-810-A-372-BMA
Installs directly between mass flow controller and interconnecting
Contains:
cable. Allows convenient access to all signals for easy
1- .010" Large Spacer
troubleshooting of system.
2- .005" Large Spacers
1- .010" Small Spacer
Contains:
2- .005" Small Spacers
1- Break Out PC Board
1- 5 Foot Extension Cable
1- Terminal PC Board