Brooks Instrument 5866M - Manual (Page 40)

6-3
Calibration
Where,
P
1
= percentage (%) of gas 1 (by volume)
P
2
= percentage (%) of gas 2 (by volume)
P
n
= percentage (%) of gas n (by volume)
Example: The desired gas is 20% Helium (He) and 80% Chlorine (Cl) by
volume. The desired full scale flow rate of the mixture is 20 slpm. Sensor
conversion factor for the mixture is:
20
1.386
80
0.876
100
Mixture Factor = = 0.945
+
Nitrogen equivalent flow = 20/.945 = 21.16 slpm Nitrogen
It is generally accepted that the mass flow rate derived from this equation
is only accurate to ±5%. The sensor conversion factors given in Table 6-1
are calculated based on a gas temperature of 21°C and a pressure of one
atmosphere. The specific heat of most gases is not strongly pressure, and/
or temperature, dependent. However, gas conditions that vary widely from
these reference conditions may cause an additional error due to the
change in specific heat caused by pressure and/or temperature.