Brooks Instrument 5866M - Manual (Page 2)

i
Contents
Contents
Section 1
Introduction
Page
Purpose ....................................................................................... 1-1
Description .................................................................................. 1-1
Principle of Operation .................................................................. 1-1
Specifications .............................................................................. 1-6
Controller Specifications .............................................................. 1-7
Section 2
Installation
Receipt of Equipment .................................................................. 2-1
Recommended Storage Practice ................................................ 2-1
General ........................................................................................ 2-1
Gas Connections ......................................................................... 2-1
Installation ................................................................................... 2-2
In-Line Filter ................................................................................ 2-3
Electrical Interface ....................................................................... 2-3
Remote Setpoint (Command) Input ............................................ 2-3
Valve Override ............................................................................. 2-5
Precision 5V Reference ............................................................... 2-5
Remote Transducer Input ............................................................ 2-5
Valve Test Point ........................................................................... 2-5
Optional Valve Return .................................................................. 2-6
Section 3
Operation
Operation ..................................................................................... 3-1
Proportional Band and Integration Time Constant Adjustment ... 3-1
Section 4
Maintenance
General ........................................................................................ 4-1
Section 5
Troubleshooting
General ........................................................................................ 5-1
Troubleshooting ........................................................................... 5-1
Disassembly ................................................................................ 5-2
Assembly ..................................................................................... 5-5
Adjusting the Control Valve .......................................................... 5-6
Orifice Sizing .............................................................................. 5-12
C
O
N
T
E
N
T
S