Brooks Instrument 5866M - Manual (Page 10)

1-7
Introduction
Flow Rates
0-30,000 sccm* (Nitrogen Equivalent).
*Standard pressure and temperature in accordance with SEMI (Semiconductor
Equipment and Materials Institute) standard: 32°F (0°C) and 101 kPa (760 Torr). Other
reference conditions available upon request.
Accuracy
±1.00% full scale including linearity and hysteresis
Repeatability
±0.1% full scale
Control Range
20:1
Zero Stability
0.001% full scale per 30 days
Temperature Range (ambient and gas)
32°F to 150°F (0°C to 65°C)
Temperature Coefficient
0.1% full scale/° C
Maximum Transducer Pressure
21.75 psia for 0-14.5 psia range
108.5 psia for 14.5-72.5 psia range
435 psia for 72.5-290 psia range
1,450 psia for 290-1,450 psia range
Maximum Design Pressure
1,450 psig
1-5 Controller Specifications
Input/Output Offset
< 0.2% full scale (voltage), < 1.5% full scale (current)
Proportional Gain
Adjustable, 1 to 200%
Integration Time
Adjustable, 0.05 to 5 seconds
Control Action
Upstream or downstream pressure control
Valve Type
Standard: Normally Closed
Optional: Normally Open
Materials of Construction
Model 5866 Model 5866M
Wetted Parts 316 SS 316L Var SS
Seals/Valve Seats Viton ® Metal
Options Buna-N
Teflon ® N/A
Kalrez ®