INFICON Cygnus Editor Software Manual - Manual (Page 65)

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Cygnus Editor Operating Manual
The following data are collected from the Cygnus Thin Film Controller for each
Channel:
Rate . . . . . . . . . . . . . . . . . . . . . . . . . Specifies the rate at which the deposition is
to be controlled during the DEPOSIT and
NON-DEPOSIT CONTROL states.
Dev +/- 10 A /sec . . . . . . . . . . . . . . . The Rate Deviation, calculated from the
difference of the measured rate to the rate
setpoint. This selection is scaled to +/- 10
Angstroms per second.
Dev +/- 20 A /sec . . . . . . . . . . . . . . . The Rate Deviation, calculated from the
difference of the measured rate to the rate
setpoint. This selection is scaled to +/- 20
Angstroms per second.
NOTE: The two Dev choices above are for the same data but provide two
different choices of scale for the Y-axis.
Power. . . . . . . . . . . . . . . . . . . . . . . . The Power, in percent, of the Channel control
output.
Thickness . . . . . . . . . . . . . . . . . . . . The Thickness of the accumulation on the
substrate.
NOTE: Refer to the Cygnus Thin Film Deposition Controller Operating Manual
(IPN 074-379) for a more thorough understanding of the data parameters.
4.2.2 The Control Panel
The Control Panel provides grids and buttons to control the display and collection
of data.
4.2.2.1 The Display Channels
As a default, all active channels are displayed on the Data Trend Graph. One or
more data parameters can be removed from the graph by unchecking the checkbox
preceding the Channel label in the grid at the top of the Control Panel. This is
shown in
Figure 4-4 . Removing a data parameter from the graph has no effect on
the collection of that data (i.e. it is still collected). The color of any channel can also
be changed by right clicking on the checkbox and selecting Change Color.
The state of each channel is shown as a text label next to the channel number. This
state, when shown in black text, indicates a good crystal (channel) status. A red
font indicates the crystal has failed, a yellow font indicates the crystal is invalid. The
state of each channel can be included in data file reports by enabling the Sensor
Status on the Data Format page (see
Figure 4-19 on page 4-13 ). Refer to the
Cygnus Thin Film Deposition Controller Operating Manual (IPN 074-379) for
information on the individual channel states and crystals.