Appendix, A. material parameters – INFICON SID-242 Thin Film Deposition Controller User Manual
Page 94

Appendix
A. Material Parameters
Material
Density
ZFactor
Material
Density ZFactor
Aluminum 2.73
1.08
Magnesium
Fluoride
3
1
Aluminum Oxide
3.97
1
Manganese
7.2
0.377
Antimony 6.62
0.768
Manganese
Sulfide
3.99
0.94
Arsenic 5.73
0.966
Mercury 13.46
0.74
Barium 3.5
2.1
Molybdenum
10.2
0.257
Beryllium 1.85
0.543
Neodymium
Fluoride
6.506
1
Bismuth 9.8
0.79
Neodymium
Oxide
7.24
1
Bismuth Oxide
8.9
1
Nickel
8.91
0.331
Boron 2.54
0.389
Niobium
8.57
0.493
Cadmium 8.64
0.682
Niobium
Oxide
4.47
1
Cadmium Selenium
5.81
1
Palladium
12
0.357
Cadmium Sulfide
4.83
1.02
Platinum
21.4
0.245
Cadmium Teluridium
5.85
0.98
Potassium Chloride
1.98
2.05
Calcium 1.55
2.62
Rhenium
21.04
0.15
Calcium Fluoride
3.18
0.775
Rhodium
12.41
0.21
Carbon Diamond
3.52
0.22
Samarium
7.54
0.89
Carbon Graphite
2.25
3.26
Scandium
3
0.91
Cerium Fluoride
6.16
1
Selenium
4.82
0.864
Cerium Oxide
7.13
1
Silicon 2.32
0.712
Chromium 7.2
0.305
Silicon Dioxide
2.2
1.07
Chromium Oxide
5.21
1
Silicon Oxide
2.13
0.87
Cobalt 8.71
0.343
Silver 10.5
0.529
Copper 8.93
0.437
Silver
Bromide
6.47
1.18
Copper Sulfide
4.6
0.82
Silver Chloride
5.56
1.32
Copper Sulfide B
5.8
0.67
Sodium
0.97
4.8
Copper Sulfide A
5.6
0.69
Sodium Chloride
2.17
1.57
Dysprosium 8.54
0.6
Sulfur
2.07
2.29
Erbium 9.05
0.74
Tantalum
16.6
0.262
Gadolinium 7.89
0.67
Tantalum
Oxide
8.2
0.3
Gallium 5.93
0.593
Tellurium 6.25
0.9
Gallium Arsenide
5.31
1.59
Terbium 8.27
0.66
Germanium 5.35
0.516
Thallium 11.85
1.55
Gold 19.3
.381
Thorium
Fluoride
6.32
1
Hafnium 13.1
0.36
Tin
7.3
0.724
Hafnium Oxide
9.63
1
Titanium
4.5
0.628
Holnium 8.8
0.58
Titanium
Oxide
4.9
1
Indium
7.3
0.841
Titanium Oxide IV
4.26
0.4
Indium Intimnide
5.76
0.769
Tungsten
19.3
0.163
Indium Oxide
7.18
1
Tungsten Carbide
15.6
0.151
Iridium 22.4
0.129
Uranium 18.7
0.238
Iron 7.86
0.349
Vanadium
5.96
0.53
Lanthanum 6.17
0.92
Ytterbium
6.98
1.13
Lanthanum Fluoride
5.94
1
Yttrium
4.34
0.835
Lanthanum Oxide
6.51
1
Yttrium Oxide
5.01
1
Lead 11.3
1.13
Zinc 7.04
0.514
Lead Sulfide
7.5
0.566
Zinc Oxide
5.61
0.556
Lithium 0.53
5.9
Zinc
Selenide
5.26
0.722
Lithium Fluoride
2.64
0.774
Zinc Sulfide
4.09
0.775
Magnesium 1.74
1.61
Zirconium
Oxide
5.6
1.001