Chapter 4 sqm-142 card, 5 demo programs, 6 sqm32c.dll – INFICON SID-242 Thin Film Deposition Controller User Manual
Page 71: 7 sqm-242 specifications
Chapter 4 SQM-142 Card
4-9
4.5 Demo Programs
The CD-ROM supplied with each SQM-242 contains three demonstration programs:
SQS-242 Demo is a demonstration version of the SQS-242 software described earlier
in this manual. It is fully functional with two exceptions: 1) it operates only in Simulate
mode, it will not actually take readings from an SQM-242 card; 2) it will not
communicate with a PLC for digital I/O.
SQM-242 VB (SQM32.EXE) is a basic deposition control program, complete with Visual
Basic source code. Operation of SQM32.EXE is explained in the on-screen tool tips
and help file.
SQM-242 LV is a LabView program that demonstrates techniques for communicating
with the SQM-242 card using LabView.
4.6 SQM32C.DLL
SQM32C.DLL and VSQM32D.VXD are Windows programs that provide access to all
SQM-242 card functions. Both files should be copied to your \WINDOWS\SYSTEM
directory.
SQM32C.DLL can be used by C/C++, Visual Basic, and LabView. The CD-ROM that
accompanies the SQM-242 contains a text file that gives the syntax for function calls to
SQM32C.DLL
4.7 SQM-242 Specifications
Sensor Inputs ....................................................................... 4 (BNC)
Input Frequency ................................................................... 1 to 10 MHz
Input Type ............................................................................ Active Oscillator
Sample Period ...................................................................... .1 to 2 sec.
Thickness Resolution* .......................................................... .2
@ .25sec.
.025
@ 2sec.
Thickness Accuracy* ............................................................ .5% + 1 count
Control Outputs .................................................................... 2 (dual phone jack)
Output Voltage ..................................................................... 0 to
10VDC
Output Resolution................................................................. 15 bits
Output Impedance ................................................................ 1 Kohm
Density=1, Z-Factor=1, Sensor Freq.=6MHz