INFICON SID-242 Thin Film Deposition Controller - Manual (Page 63)

Chapter 4 SQM-142 Card
4-1
4.0 Introduction
This section covers installation, operation, and programming of the SQM-242 card.
The SQM-242 is a deposition controller on a PC card. Each SQM-242 card has four 1-
10MHz quartz sensor inputs, and two 0-10V control outputs. Up to two cards can be
installed in a computer.
The diagram below shows a typical single-sensor deposition system. The SQM-242
receives sensor inputs via a BNC cable from each sensor oscillator. It supplies a
control voltage to the evaporation power supply (this connection is not shown in this
diagram). The SQM-242’s internal circuitry measures the sensor inputs, calculates the
measured deposition rate against the desired rate, and updates the output voltage
based on its PID control loop calculations. The evaporation supply adjusts power to the
evaporation source based on the control voltage input.
Visual Basic and LabView demonstration programs allow easy setup and operation. A
Windows DLL also provides user-written programs access to SQM-242 setup and
readings.
In-Vac
Cable
6” BNC
Cable
10’ BNC
Cable
Ground
Cables
Evaporation
Power Supply
Computer
Oscillator
System Gnd