INFICON SID-242 Thin Film Deposition Controller - Manual (Page 22)

Chapter 2 Quick Start
2-10
As shown below, the initial deposition rate was 10 Å/s until a thickness of .400 kÅ.
Then the deposition rate was ramped up to 15 Å/s, and held until the desired final
thickness of 1.000 kÅ is achieved. At this point, this single-layer process is finished.
Deposition Phase with one Rate Ramp
You should adjust the PID parameters on the setting ribbon, then Start/Stop the process
several times to become familiar with their effect on control loop response.