INFICON SID-242 Thin Film Deposition Controller - Manual (Page 6)

Chapter 3 SQS-242 Software (continued)
3.4.4 System ........................................................................................................3-17
Sensors ...................................................................................................3-17
Sources ...................................................................................................3-18
Digital I/O .................................................................................................3-19
PLC Setup ...............................................................................................3-22
SQM-242 Setup .......................................................................................3-23
RS232 Setup ...........................................................................................3-24
3.4.5 Security .......................................................................................................3-25
3.5 View Menu .......................................................................................................3-27
3.6 Specifications ...................................................................................................3-28
Chapter 4 SQM-242 PC Card
4.0 Introduction ......................................................................................................4-1
4.1 Installation ........................................................................................................4-2
4.2 Sensor Connections .........................................................................................4-4
4.3 Power Supply Connection ................................................................................4-4
4.4 TroubleShooting ...............................................................................................4-4
4.5 Demo Programs ...............................................................................................4-7
4.6 SQM32C.DLL ...................................................................................................4-7
4.7 Specifications ...................................................................................................4-7
Chapter 5 Digital I/O
5.0 Introduction ......................................................................................................5-1
5.1 PLC Installation ................................................................................................5-2
5.2 PLC Setup and Test .........................................................................................5-3
5.2 PLC Programming ............................................................................................5-4
Chapter 6 Computer Interface
6.0 Introduction ......................................................................................................6-1
6.1 Serial Interface .................................................................................................6-1
6.2 Ethernet Interface .............................................................................................6-1
6.3 SQS-242 Comm Program ................................................................................6-2
6.4 Protocol ............................................................................................................6-3
6.5 Command Summary ........................................................................................6-5
Appendix
A. Material Parameters
B. Loop Tuning