INFICON SID-242 Thin Film Deposition Controller - Manual (Page 78)

Chapter 5 Digital IO
5-5
02 Not Used
11 Layer Stopped
03 Not Used
12 Layer Starting
04 Process Stopped
13 Not Used
05 Ramp1 Phase
14 Feed Ramp Phase
06 Soak1 Phase
15 Feed Hold Phase
07 Ramp2 Phase
16 Idle Ramp Phase
08 Soak2 Phase
17 Idle Phase
201
Sensors/Outputs
Register (updated each layer)
Bits 0-7 are sensors used (1=used, 0=unused)
Bits 12-15 are outputs used, 12 is Out1, 13 is Out2, etc.
220
Source
Index
Register (updated each layer)
Bits 0-3 are BCD
of Ouput1 source index
Bits 4-7 are BCD
of Ouput2 source index
Bits 8-11 are
BCD of Ouput3 source index
Bits 12-15 are
BCD of Ouput4 source index
221