INFICON SID-242 Thin Film Deposition Controller - Manual (Page 23)

Chapter 2 Quick Start
2-11
2.6 SoftKey Functions
As you have seen, the SoftKey functions remain constant during deposition. Spend a
few minutes to become familiar with each of these SoftKey functions.
START
PROCESS
ABORT
PROCESS Starts the first layer of a process when START is pushed. If
AUTO->MAN is shown on the third SofKey (AUTO Mode) the
process starts PreConditioning. If MAN->AUTO is shown on
the third Softkey (MANUAL mode) the process immediatly
starts Deposition under PID loop control.
Aborts the process. The process can only restart at the first
layer.
START
LAYER
STOP
LAYER
NEXT
LAYER
Starts a stopped layer, or a layer that has been designated
“Manual Start” in the process database. Starts the layer based
on the state of the AUTO->MAN SoftKey as described above.
Stops the current layer. Also changes the function of the first
SoftKey to NEXT LAYER.
Abandons the current layer and moves to the next layer in the
process. If it is the last layer of a process, the same as
pushing ABORT PROCESS.
AUTO->MAN
MAN->AUTO
When AUTO->MAN is pushed, the source output is set to
manual control.. You may adjust the output using the settings
ribbon. Because the PID loop is not running, you can manually
set the output power to different levels and observe the
associated deposition rate.
Returns the output to PID loop control. If the process is
running (ABORT PROCESS and STOP LAYER shown on the
first two SoftKeys) depsoition continues. If the process is
stopped, sets the output to zero and awaits a start command.
ZERO Resets the thickness reading to zero.
NEXT
FILM Sequences the setting ribbon through each Film in a
codeposition layer.
NEXT
SETTING When the settings ribbon is shown, sequences the setting knob
action through each of the displayed parameters.