INFICON SID-242 Thin Film Deposition Controller - Manual (Page 60)

Chapter 3 SQS-242 Software
3-30
Material Parameters
Name .................................................................................... 12 characters
Density ................................................................................. .0.40 to 99.99 gm/cm
3
Z-Factor ................................................................................ 0.100 to 9.900
Computer Interface
Type ..................................................................................... RS-232
Protocol ................................................................................ Text string with checksum
Digital Inputs (available only with PLC option)
Start Process ........................................................................
Stop Process ........................................................................
Start Layer ............................................................................
Stop Layer ............................................................................
Start Next Layer ...................................................................
Zero Thickness .....................................................................
Force Final Thickness .........................................................
Substrate Index Complete
Source Index Complete
Relay Outputs (available only with PLC option)
Source Shutter ..................................................................... 1 to 4
Sensor Shutter ..................................................................... 1 to 8
All Crystal Fail ......................................................................
All Crystal Good ...................................................................
Process Running ..................................................................
Process Stopped ..................................................................
Process Active .....................................................................
Deposit Phase ......................................................................
Pre-Cond Phase ...................................................................
Feed/Idle Phase ...................................................................
Manual Mode .......................................................................
Max Power ...........................................................................
Thickness Setpoint ...............................................................
Time Setpoint .......................................................................
Final Thickness ....................................................................
Substrate Index Select ......................................................... 0 to 15
Source Index (Pocket) Select ............................................... 0 to 15
Security
User Name ........................................................................... 16 characters
Password ............................................................................. 8 characters
Access .................................................................................. 3 levels