Chapter 5 digital io, 2 plc setup and test, 3 plc programming – INFICON SID-242 Thin Film Deposition Controller User Manual
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Chapter 5
Digital IO
5-4
Source Index 2,
Pockets 1-4
Input
1.01
Source Index 2
Done
5.2 PLC Setup and Test
In the SQS-242 software select Edit, Setup, then the PLC tab. Set the Address to
match the PLC Address. Set the Comm Port to the serial port you are using.
The Test section provides a means of testing your PLC communications and digital I/O
wiring. To set a relay on the PLC, go to the Digital I/O tab and find which I/O event is
assigned to that relay. On the PLC tab, select the same event in the test dropdown,
then click Set. The assigned Relay# should close. Click Clear to open the relay.
To test a digital input, find the Input# that is assigned to an event on the PLC tab.
Select the input event in the dropdown, then click Read Input to verify the input state.
To move a source or substrate indexer, select the index (i.e. pocket) to activate, then
click the appropriate move button. For source indexers, each indexer will move.
5.3 PLC Programming
The Omron PLC runs a small monitor program that converts RS-232 commands to the
physical relay outputs and digital inputs wired to the PLC. Using Omron’s CX-
Programmer ladder logic software, the PLC monitor program can be modified to provide
additional decision and control functions. The functions of the internal PLC registers
used by the standard SQS-242 program are shown below. Contact Sigma Instruments
for further information.
PLC Register
SQS-242
Function
200
Layer/Phase
Register
Bits 0-9 are BCD layer number running
Bits 10-15 are BCD Phase# as shown below
00 Application Startup
09
ShutterDelay
Phase
01 Program Initializing
10
Deposit
Phase