INFICON SID-242 Thin Film Deposition Controller - Manual (Page 17)

Chapter 2 Quick Start
2-5
2.4 Single-Layer Process Setup
A thin-film deposition process consists of one or more layers of material evaporated
onto a substrate. Let’s build a simple single-layer process.
Open
Process Edit Use the touchpad to click on the “Edit” menu selection along
the top of the display, then click “Process.” The Process Edit
dialog will display the setup for the last process run.
To better understand process setup, see section 3.4.1.
Add A New
Process Click the “New” button in the dialog box. An on-screen
keyboard appears, displaying the next numbered Process.
Click “Backspace” several times to delete the name. Now
“type” a new Process name using the touchpad and on-screen
keyboard. Click “Enter” to save the new name.
Edit
Film
Click the “Layer” tab to assure the layer parameters are
displayed. Select “Gold Sample” in the Film dropdown box.
Edit Rate and
Thickness Click the “Initial Rate” setting, and then use the Control Knob to
adjust the Initial Rate to 10 Å/s. Adjust the “Final Thickness” to
1.000 kЕ.