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Graph displays, Displays -3, Figure 5-3 rate vs. time graph -3 – INFICON MDC-360C Thin Film Deposition Controller User Manual

Page 87: Figure 5-4 rate deviation vs. time graph -3, Figure 5-5 thickness vs. time graph -3

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MDC-360C DEPOSITION CONTROLLER

OPERATING THE MDC-360C

5-3

5.5 GRAPH

DISPLAYS

There are four different run time graph screens that can be displayed at any time
by pressing the Graph key (providing they have each been enabled in the Edit
Display Setup menu). The first key press will bring up the last viewed graph
screen, repeatedly pressing the Graph key will cycle through the four graph
screens, shown below.

Figure 5-3 Rate vs. Time Graph

Figure 5-4 Rate Deviation vs. Time graph

Figure 5-5 Thickness vs. Time Graph

Sample Cr Process Ready
10

Rate






0 1

Sample Cr Process Ready
5

Rate Dev%


1



5

Sample Cr Process Ready
999

Thickness






0 1

Displays the current
process name.

Displays the current
material name.