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Material, Material -2 – INFICON MDC-360C Thin Film Deposition Controller User Manual

Page 182

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MDC-360C DEPOSITION CONTROLLER

SYSTEM:

ENTERED BY:

APPROVED BY:

DATE:

14.1 MATERIAL

Material Number

Material Name

Sensor #

Crystal #

Source #

Pocket #

Material Density

Acoustic Impedance

Tooling Factor

Proportional gain

Integral Time constant

Derivative Time constant

Rise to Soak Time

Soak Power

Soak Time

Rise to Predeposit Time

Predeposit Power

Predeposit Time

Rate Establish Time

Rate Establish Error

Deposition Rate 1

Rate Ramp Start 1

Rate Ramp Stop 1

Deposition Rate 2

Rate Ramp Start 2

Rate Ramp Stop 2

Deposition Rate 3

Rate Ramp Start 3

Rate Ramp Stop 3

Deposition Rate 4

Rate Ramp Start 4

Rate Ramp Stop 4

Deposition Rate 5

Time Setpoint

Ramp to Feed Time

Feed Power

Feed Time

Ramp to Idle Time

Idle Power