INFICON MDC-360C Thin Film Deposition Controller - Manual (Page 168)

MDC-360C DEPOSITION CONTROLLER
COMPUTER INTERFACE 11-26
All string values are in ASCII format including decimal points and colons where
needed. See send run-time values (Code #30) above for details on the
source/sensors status, controller trouble and controller mode bits.
For example, to instruct the MDC to output rate and power the computer would
send the following message:
Chr$(255)+Chr$(254)+Chr$(1)+Chr$(31)+Chr$(6)+Chr$(5)+Chr$(0)+Ch
r$(0)+Chr$(0)+Chr$(0)+Chr$(0)+Chr$(213)
Sending the following message stops data logging:
Chr$(255)+Chr$(254)+Chr$(1)+Chr$(31)+Chr$(6)+Chr$(0)+ Chr$(0)+
Chr$(0)+ Chr$(0)+ Chr$(0)+ Chr$(0)+Chr$(218)
33. Internal Command
34. Set Active Source Power (Code #33)
Instructs the controller to enter the incoming source power value into the active
source power. This command only works if the controller is in the manual power
control mode. A description of the manual power parameter list is as follows:
Parameter Name Length (bytes) Allowable Range
Source Power 2 (0-999) units are 0.1%
Total 2 bytes
For example, to set the source power to 50% the computer would send the
following message:
Chr$(255)+Chr$(254)+Chr$(1)+Chr$(33)+Chr$(2)+Chr$(1)+Chr$(244)+
Chr$(231)
35. Internal Command
36. Internal Command
37. Send Process Log Directory (Code #36)
Instructs the controller to send the process log directory to the host computer.
This command is only valid on controllers with the internal data log storage
option installed. The process log directory consists of 16 individual process logs.
The data format of a process log is listed in the following table:
Parameter Name Length (bytes) Allowable Range
Process Log Name 12 All ASCII Characters
Process Run Number 2 (1-9999)
Starting Time 3 (00:00:00-23:59:59)
HH:MM:SS
Starting Date 3 (01/01/00-12/31/99)
MM:DD:YY
Completion Time 3 (00:00:00-23:59:59)
HH:MM:SS