INFICON MDC-360C Thin Film Deposition Controller - Manual (Page 11)

vi
Table of Contents
SAFETY PRECAUTION AND PREPARATION FOR USE................................................... IV
SAFETY TERMS AND SYMBOLS .............................................................................................V
1. GENERAL DESCRIPTION ............................................................................................. 1-1
1.1 PURPOSE ....................................................................................................................... 1-1
1.2 FEATURES .................................................................................................................... 1-1
1.2.1 MULTI-CRYSTAL AVERAGING ............................................................................... 1-1
1.2.2 EXTENSIVE PROGRAM STORAGE ......................................................................... 1-1
1.2.3 DYNAMIC MEASUREMENT UPDATE RATE .......................................................... 1-1
1.2.4 SUPERIOR COLOR GRAPHICS DISPLAY .............................................................. 1-1
1.2.5 PROGRAM SECURITY.............................................................................................. 1-1
1.2.6 DESIGNED FOR UNATTENDED OPERATION ...................................................... 1-1
1.2.7 FAIL SAFE ABORTS.................................................................................................. 1-2
1.2.8 ABORT STATUS RETENTION .................................................................................. 1-2
1.2.9 RUN COMPLETION ON CRYSTAL FAILURE ......................................................... 1-2
1.2.10 POWERFUL SYSTEM INTERFACE..................................................................... 1-2
1.2.11 POWER SUPPLY NOISE TOLERANCE............................................................... 1-2
1.2.12 INTERNATIONAL STANDARD POWER CONNECTOR ..................................... 1-2
1.2.13 FIELD UPGRADABLE ......................................................................................... 1-2
1.3 SPECIFICATIONS......................................................................................................... 1-3
1.3.1 MEASUREMENT ....................................................................................................... 1-3
1.3.2 DISPLAY .................................................................................................................... 1-3
1.3.3 COMMUNICATION................................................................................................... 1-3
1.3.4 PROGRAM STORAGE CAPACITY ........................................................................... 1-3
1.3.5 PROCESS PARAMETERS ......................................................................................... 1-3
1.3.6 MATERIAL PARAMETERS ....................................................................................... 1-4
1.3.7 INPUT/OUTPUT CAPABILITY ................................................................................. 1-5
1.3.8 SENSOR PARAMETERS............................................................................................ 1-5
1.3.9 SOURCE PARAMETERS ........................................................................................... 1-6
1.3.10 RECORDER PARAMETERS ................................................................................. 1-6
1.3.11 UTILITY SETUP PARAMETER ............................................................................ 1-6
1.3.12 OTHER .................................................................................................................. 1-6
1.4 ACCESSORIES .............................................................................................................. 1-7
2. FRONT PANEL DISPLAYS AND CONTROLS ........................................................... 2-1
2.1 OPERATING DISPLAYS .............................................................................................. 2-1
2.1.1 RATE .......................................................................................................................... 2-1
2.1.2 POWER ...................................................................................................................... 2-1
2.1.3 THICKNESS ............................................................................................................... 2-1
2.1.4 LAYER NUMBER....................................................................................................... 2-1
2.1.5 CRYSTAL HEALTH % ............................................................................................... 2-1
2.1.6 TIME DISPLAY .......................................................................................................... 2-2
2.2 PARAMETER/STATUS DISPLAYS ............................................................................ 2-2
2.3 OPERATING CONTROLS ............................................................................................ 2-2
2.3.1 MANUAL KEY ........................................................................................................... 2-2
2.3.2 START KEY ................................................................................................................ 2-3
2.3.3 ABORT KEY ............................................................................................................... 2-3
2.3.4 RESET KEY................................................................................................................ 2-3
2.3.5 ZERO KEY ................................................................................................................. 2-3
2.3.6 SHUTTER KEY .......................................................................................................... 2-3
2.3.7 STATUS KEY.............................................................................................................. 2-3
2.3.8 GRAPH KEY .............................................................................................................. 2-3
2.3.9 ARROW KEYS ............................................................................................................ 2-4