INFICON MDC-360C Thin Film Deposition Controller User Manual
Page 164
MDC-360C DEPOSITION CONTROLLER
COMPUTER INTERFACE
11-22
Value Description
Length
(bytes)
Format
Units
Power 4
String
%
Average Thickness
5
String
KÅ
Average Rate
4
String
Å/sec
Active Crystal Health
2
String
%
Layer number
3
String
None
Rate deviation
4
String
%
Active process number
2
String (0-98)
Active material number
2
String (0-31)
Active source number
1
String (1-6)
Sensor #1-6 Rate
4x6
String
Å/sec
Sensor #1-6 Thickness
5x6
String
KÅ
Sensor #1-6 Crystal Position
1x6
String (1-8)
Sensor #1-6 Crystal Health
2x6
String (0-99)
%
Source #1-6 Pocket Position
1x6
String (1-16)
Layer Time To Go
7
String
h:mm:ss
State Time To Go
7
String
h:mm:ss
Elapsed Process Time
7
String
h:mm:ss
Elapsed Layer Time
7
String
h:mm:ss
Elapsed State Time
7
String
h:mm:ss
Source #1-6 Status
1x6
Bit 0 = Shutter
Bit 1 = Rotator Drive Up
Bit 2 = Rotator Drive Down
Sensor #1-6 Status
1x6
Bit 0 = Shutter
Bit 1 = Rotator Drive Up
Bit 2 = Rotator Drive Down
Bit 3 = Enabled
Bit 5 = Failed
Controller State
1
Binary (0-25)
Abort Process Errors
1
Bit 6 = Max Rate&Min Pwr
Bit 7 = Min Rate&Max Pwr
Alarm 1 Errors
1
Bit 0 = Action Setup
Corrupted
Bit 1 =Output Setup
Corrupted
Bit 2 = Input Setup Corrupted
Bit 3 = Crystal Fail, Process
Halted
Bit 4 = Rate Establish Error
Bit 5 = Active Layer
Corrupted
Bit 6 = Active Process
Corrupted
Bit 7 = System Setup
Corrupted