INFICON MDC-360C Thin Film Deposition Controller - Manual (Page 191)

MDC-360C DEPOSITION CONTROLLER
15. INDEX
A
alpha characters, entering, 4-1
automatic crystal switching. See crystal
switching
C
computer interface, 11-1
data types, 11-3
IEEE-488 parallel interface, 11-2
instruction descriptions, 11-5
instruction summary, 11-4
message received status, 11-3
protocol, 11-2
RS-232 serial interface, 11-1
RS-485 serial interface, 11-1
contrast, 2-4, 4-3
control loop, tuning, 6-1
establishing control loop parameters,
6-3
copying and deleting, 4-2
Crystal
care and handling, 9-3
replacement procedure, 9-3
crystal failure, 3-4
Crystal Health, 2-1, 10-3
crystal switching, 4-12
D
DAC (Digital to Analog Converter)
bench checkout, 3-5
communications, send utility
parameters, 11-6
input characteristics, 7-2
interface cable description, 8-4
menu, DAC Output, 4-42
menu, DAC Scale, 4-42
menu, EDIT DAC SETUP, 4-42
output characteristics, 7-2
output circuit schematic, 7-5
plug pin out, 13-2
setup, 4-4
socket connector pin out, 8-8
specification, recorder outputs, 1-5
troubleshooting, 12-3
deposit state, 3-4, 4-21
display
Crystal Health, 2-1
Layer Number, 2-1
Power, 2-1
Rate, 2-1
Thickness, 2-1
Time Display, 2-2
display setup, 4-10
E
empirical calibration, 10-5
F
front panel, 2-1, 2-2, 3-1, 3-6, 4-26, 8-1,
8-3, 11-1, 11-2, 11-32
fuse
replacement, 8-2
G
getting started. See programming
sequence
graph displays, 5-3
graphics display, 1-1, 2-2
ground lug, 8-2
grounding, iv
I
input, output and action setup, 4-9
input/output characteristics, 7-1
digital-to-analog converter control
inputs, 7-2
digital-to-analog converter outputs, 7-
2
discrete inputs, 7-1
discrete outputs, 7-1
sensor input, 7-1
source control voltage output, 7-1
installation, controller, 8-1
external connections, 8-1
mounting, 8-1