Mdc-360c, Film deposition controller – INFICON MDC-360C Thin Film Deposition Controller User Manual
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O P E R A T I O N a n d S E R V I C E M A N U A L
MDC-360C
Film Deposition Controller
IPN 624800 Rev. F
www.inficon.com [email protected]
Due to our continuing program of product improvements, specifications are subject to change without notice.
©2007 INFICON
®
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