INFICON MDC-360C Thin Film Deposition Controller - Manual (Page 173)

MDC-360C DEPOSITION CONTROLLER
COMPUTER INTERFACE 11-31
Bit 1 = Rotator Drive Up
Bit 2 = Rotator Drive Down
34 Sensor #1-6 Status 1x6 Bit 0 = Shutter
Bit 1 = Rotator Drive Up
Bit 2 = Rotator Drive Down
Bit 3 = Enabled
Bit 5 = Failed
35 Controller State 1 Binary (0-25)
36 Abort Process Errors 1 Bit 6 = Max Rate&Min Pwr
Bit 7 = Min Rate&Max Pwr
Alarm 1 Errors 1 Bit 0 = Action Setup Corrupted
Bit 1 =Output Setup Corrupted
Bit 2 = Input Setup Corrupted
Bit 3 = Crystal Fail, Process
Halted
Bit 4 = Rate Establish Error
Bit 5 = Active Layer Corrupted
Bit 6 = Active Process
Corrupted
Bit 7 = System Setup
Corrupted
Alarm 2 Errors 1 Bit 1 = No Sensor Enabled for
Material
Bit 2 = Halt Process Action
Bit 3 = Sound Alarm Action
Bit 4 = Rate Deviation Alarm
Bit 5 = Crystal Fail, Time
Power Mode
Bit 6 = Sensor Fault
Bit 7 = Source Fault
Alert Errors 1 Bit 3 = Sound Alert Action
Bit 4 = Minimum Power Alert
Bit 5 = Maximum Power Alert
Bit 6 = Rate Deviation Alert
Bit 7 = Crystal
Marginal&Deposit
Attention 1 Errors 1 Bit 0 = Process Complete
Bit 1 = Minimum Power
Attention
Bit 2 = Maximum Power
Attention
Bit 3 = Rate Deviation
Attention
Bit 4 = Crystal Marginal&!In
Process
Bit 5 = Crystal Fail&! In
Process