INFICON MDC-360C Thin Film Deposition Controller - Manual (Page 193)

MDC-360C DEPOSITION CONTROLLER
position control, 4-8
sign-on screen, 5-1
Simulate mode, 3-1, 3-4, 3-6, 4-4, 4-43
source
abort key operation, 2-3, 5-7
accessories, board part number, 1-7
control loop basics, 6-1
Edit Source Setup menu, 4-39
Edit System Setup Menu, 4-4
general description, 1-2
input/output characteristics, 7-1
manual key, manual operation, 2-2
manual operation, 3-4
messages
change pocket, 5-12
change source, 5-9
source fault, 5-9, 5-10
option boards, 3-4
programming
defining a material, 4-17
material setup, 4-11
pocket control, 4-5
pocket position feedback, 4-6
power ramps, 4-11
rate establish, 4-12
source shutter, 4-4
source voltage, 4-5
Source/Sensor Status screen, 5-4
specifications, I/O capability, 1-5
specifications, material parameter, 1-4
specifications, parameters, 1-6
starting a new layer, 5-2
starting a new process, 4-13, 5-1
states, 5-8
status displays, 5-4
substrate heat control, 4-10
T
theory of operation, 10-1
basic measurement, 10-1
crystal health calculation, 10-3
film thickness calculation, 10-1
multi-sensor averaging, 10-4
rate calculation, 10-3
thickness overshoot, 4-12
Time Display, 2-2
time parameters, entering, 4-2
trouble, error and warning messages, 5-8
U
utility setup, 4-4
V
viewing results, 5-5
voltage selection, 8-2