INFICON Front Load Single Sensor - Manual (Page 86)

5 - 10
PN
07
4-
15
6N
Front Load Single and Dual Sensors Operating Manual
5.1.3 Crystal Sensor Emulator
A very useful tool for rapidly evaluating the cause of a persistent Crystal Fail
message is the optional Crystal Sensor Emulator (PN 760-601-G2) used in
conjunction with a thin film deposition controller or monitor (see
Figure 5-7 ).
The Crystal Sensor Emulator contains a known "good" 5.5 MHz crystal that may be
attached at various points in the measurement system to isolate the cause of a
Crystal Fail. The three connectors on the Crystal Sensor Emulator allow
connection to a BNC cable, or an in-vacuum cable, or the sensor head cavity
(removal of the shutter may be required for a Front Load Dual sensor to allow
adequate clearance). (See
Figure 5-8 .)
To use the Crystal Sensor Emulator to isolate the cause of a Crystal Fail message,
start at
section 5.1.3.1 on page 5-11 .
NOTE: Crystal Sensor Emulator PN 760-601-G1 (obsolete) is not compatible with
IC6, IC/5, and IC/4. However, PN 760-601-G2 is fully compatible with all
INFICON thin film deposition controllers and monitors.
 The value of Crystal Life (Health) displayed by the controller or monitor
depends on the model. See
section 5.1.3.4, Crystal Life Readings, on page
5-13 .
 It is normal for Unable To Auto Z to be displayed if the Crystal Sensor Emulator
is used with a deposition controller configured to use the Auto Z feature.
CAUTION
Crystal Sensor Emulator is not intended for use in
vacuum. Do not leave it installed in the vacuum system
during processing.
Figure 5-7 Crystal Sensor Emulator
Female
BNC
Connector
Female
Coaxial
Connector
Crystal
Holder Cavity
Connector