INFICON Front Load Single Sensor User Manual
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PN
07
4-
15
6N
Front Load Single and Dual Sensors Operating Manual
2.1.2 Sensor Check with STM-2XM, STM-3, SQM-160, SQC-310, SQM-242, or
IQM-233 Deposition Controller/Monitor
1
Connect the in-vacuum cable from the sensor head to the feedthrough
or a coax adapter (Microdot/BNC).
2
Connect one end of the 15.2 cm (6 in.) BNC cable (PN 782-902-011)
to the BNC connector on the feedthrough.
3
Connect the other end of the 15.2 cm (6 in.) BNC cable to the connector
of the oscillator (PN 782-900-010 or 783-500-013) labeled Feedthrough or
Sensor.
4
Connect one end of the oscillator cable (PN 782-902-012-XX)
to the mating connector of the oscillator labeled Instrument or Control Unit.
5
Connect the other end of the oscillator cable to a sensor connector
at the rear of the controller/monitor.
6
Install the crystal as instructed by
7
Connect power to the controller.
8
Set the power switch to ON.
9
For the SQM-242 card, IQM-233 card, or STM-3, launch the appropriate
software.
10
Set density at 1.00 g/cm
3
.
11
Zero the thickness. The display should indicate 0 or ± 0.001 kÅ.
Crystal life should read from 95 to 100%.
12
Breathe heavily on the crystal. A thickness indication of 1.000 to 2.000 kÅ
should display. When the moisture evaporates, the thickness indication should
return to approximately zero. If these conditions are observed, the sensor is in
proper working order and may be installed (see