For an – INFICON Front Load Single Sensor User Manual
Page 60
3 - 2
PN
07
4-
15
6N
Front Load Single and Dual Sensors Operating Manual
8
Connect the 3.175 mm (1/8 in.) air tube from the A port of the solenoid valve to
the quick disconnect fitting installed in step 7, see
9
Attach the P port of the solenoid valve to a source of air. The air supply must
be 70 psi (gauge) {85 psi (absolute)} (5.8 bar (absolute)) [584 kPa (absolute)]
(minimum) to 80 psi (gauge) {95 psi (absolute)} (6.5 bar (absolute))
[653 kPa (absolute)] (maximum), see
section 3.4, Pneumatic Connections, on
.
WARNING
Do not exceed 100 psi (gauge) {115 psi (absolute)}
(7.9 bar (absolute)) [791 kPa (absolute)].
Connection to excessive pressure may result in personal
injury or equipment damage.
CAUTION
Maximum temperature for the solenoid valve assembly
is 105 °C for bakeout and operation.
10
Make electrical connections to the solenoid valve (see
3.3 Installation with a CF40 (2-3/4 in. ConFlat) Feedthrough
If the solenoid valve assembly is to be used with the CF40 (2-3/4 in. ConFlat)
feedthrough, modify the valve bracket as follows (see
1
Align the score line on the solenoid valve bracket over the edge of a table or
other square edge.
2
Using pliers, grasp the part of the bracket extending over the edge and push
down. The assembly will break along the score line.
3
Use a file to smooth any rough edges which occur along the break.
When installing the solenoid valve assembly with a dual sensor, a CF40 (2-3/4 in.
ConFlat) feedthrough equipped with three pass tubes (two water and one air) and
two coaxial feedthroughs (PN 002-080, refer to
, or PN
) is required.
All other shuttered sensors using CF40 (2-3/4 in. ConFlat) feedthroughs require
only a single coaxial feedthrough (PN 750-685-G1, refer to
, or PN 750-685-G2,