2 materials, 3 installation requirements – INFICON Front Load Single Sensor User Manual
Page 18
1 - 8
PN
07
4-
15
6N
Front Load Single and Dual Sensors Operating Manual
1.5.2 Materials
Body and Holder . . . . . . . . . . . . . . . 304 stainless steel
Springs, Electrical Contacts . . . . . . . Au plated Be-Cu
Water Tubes . . . . . . . . . . . . . . . . . . . 304 stainless steel
In-Vacuum Cable . . . . . . . . . . . . . . . Silver coated copper, Teflon® insulated
Electrical Connector . . . . . . . . . . . . . Glass insulated
Insulators . . . . . . . . . . . . . . . . . . . . . >99% Al
2
O
3
Braze . . . . . . . . . . . . . . . . . . . . . . . . Vacuum process high temperature
Ni-Cr alloy
1.5.3 Installation Requirements
Feedthrough. . . . . . . . . . . . . . . . . . . Without Shutter
Two pass water 4.8 mm (3/16 in.)
OD tubing with Microdot® coax connector
(see
With Shutter
Three pass tubes (two water and one air)
4.8 mm (3/16 in.) OD tubing with Microdot
coax connector
(see
Vacuum tight braze or weld joint or
connectors for the water tubes
(welded connections or connections using
Ultra-Torr® O-ring compression fittings may
be provided by INFICON if
sensor/feedthrough combination is
ordered, see
)
Other . . . . . . . . . . . . . . . . . . . . . . . . XIU or oscillator to match specific
controller/monitor
The cable length from the crystal to the
oscillator should not exceed 101.6 cm
(40 in.) unless a ModeLock instrument is
used. Refer to the controller/monitor
operating manual for cable length limitations.
SL-X1XXX only: Solenoid Valve for air,
PN 750-420-G1
(see
)
Water Flow Rate. . . . . . . . . . . . . . . . Minimum water flow 150 to 200 cm
3
/min,
30°C maximum