INFICON Front Load Single Sensor User Manual
Page 57
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PN
07
4-
15
6N
Front Load Single and Dual Sensors Operating Manual
2.4 Sensor Shutter Module Installation on Existing Equipment
Installation of sensor shutters on existing equipment requires a Shutter Module
(PN 750-210-G1 or 750-210-G3, refer to
). The Shutter
Module may be installed on either the standard crystal sensor (SL-A0XXX) or the
right angle crystal sensor (SL-B0XXX).
2.4.1 Shutter Module Installation on a
Standard Crystal Sensor (PN SL-A0XXX)
Refer to INFICON drawing PN 750-211,
,
and drawing PN 750-210,
1
Remove the shutter to provide easier installation.
2
Rotate the shutter module until the holes through the mounting plate of the
shutter module coincide with the #4-40 tapped holes in the rear side of the
standard crystal sensor assembly.
3
Secure the shutter module to the standard crystal sensor assembly
using the #4-40 x 9.5 mm (3/8 in.) hardware provided with the shutter module.
4
Hold the sensor with the crystal opening facing upward. Mount the shutter onto
the shaft. Do not tighten the shutter.
5
Attach the shutter and position it directly over the center of the crystal opening.
Tighten the shutter cap screw. Make certain that the shutter, when activated,
does not block deposition of the evaporant stream onto any portion of the
crystal.
2.4.2 Shutter Module Installation on a
Right Angle Crystal Sensor (PN SL-B0XXX)
Refer to INFICON drawing PN 750-210,
,
and drawing PN 750-213,
.
1
Remove the shutter to provide easier installation.
2
Position the holes of the shutter module mounting plate over the #4-40 tapped
holes in the rear of the right angle crystal sensor.
3
Secure the shutter module to the right angle crystal sensor assembly
using the #4-40 x 9.5 mm (3/8 in.) hardware provided with the shutter module.
4
Hold the sensor with the crystal opening facing upward. Mount the shutter onto
the shaft. Do not tighten the shutter.
5
Attach the shutter and position it directly over the center of the crystal opening.
Tighten the shutter cap screw. Make certain that the shutter, when activated,
does not block deposition of the evaporant stream onto any portion of the
crystal.