INFICON Front Load Single Sensor - Manual (Page 53)

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Front Load Single and Dual Sensors Operating Manual
In many cases installing multiple sensors to monitor one source can improve
thickness accuracy. The rules for multiple sensors are the same as for a single
sensor installation, and the locations chosen must be as defined above. Consult
the monitor or controller manual for more information regarding the availability of
this feature.
NOTE: A technical description may be found in the 39th Annual Conference
Proceedings, Society of Vacuum Coaters, Reducing Process Variation
Through Multiple Point Crystal Sensor Monitoring, J. Kushneir, C. Gogol,
J. Blaise, pp19-23, ISSN 0737-5921 (1996).
2.3 Sensor Installation Procedure
CAUTION
The sensor head, water tubes, cable, etc., should be
clean and free of grease when installed in the vacuum
chamber. Clean nylon or talc-free gloves should be worn
while handling any sensor components.
If parts do become contaminated, clean them thoroughly
using a suitable solvent to avoid outgassing.
NOTE: If the purchased sensor is a complete sensor/feedthrough combination
and no modifications are required, start with step 9.
1 Assemble the sensor mounting bracket (provided by customer)
on the process system.
NOTE: Two tapped holes are provided on the back of each sensor body for
attaching to the system. One additional tapped hole is provided on the
back of the shutter assembly for added support.
2 Temporarily position and attach the sensor head as outlined in
the general guidelines above (refer to
Figure 2-1 on page 2-5 ).
3 Temporarily install the feedthrough.