INFICON Front Load Single Sensor - Manual (Page 59)

3 - 1
PN
07
4-
15
6N
Front Load Single and Dual Sensors Operating Manual
Chapter 3
Solenoid Valve Assembly Installation
3.1 Introduction
The solenoid valve assembly (PN 750-420-G1) and the feedthrough should be
installed at the same time. The same solenoid valve is used for both the 2.54 cm
(1 in.) bolt feedthrough and the CF40 (2-3/4 in. ConFlat) feedthrough.
 For an Installation with a 2.54 cm (1 in.) Bolt Feedthrough, see section 3.2 on
page 3-1 .
 For an Installation with a CF40 (2-3/4 in. ConFlat) Feedthrough, see section 3.3
on page 3-2 .
3.2 Installation with a 2.54 cm (1 in.) Bolt Feedthrough
When installing the solenoid valve assembly with a dual sensor, a 2.54 cm (1 in.)
bolt equipped with three pass tubes (two water and one air) and two coaxial
feedthroughs (PN 750-707-G1, refer to
Figure 1-18 on page 1-28 ) is required.
All other shuttered sensors using 2.54 cm (1 in.) bolt feedthroughs require only
a single coaxial feedthrough (PN 750-030-G1, refer to
Figure 1-17 on page 1-27 ).
Most INFICON 2.54 cm (1 in.) bolt feedthroughs with air lines are equipped with a
fitting adapter (PN 007-133). This adapter provides an easy way to attach a quick
disconnect fitting (included with the PN 750-420-G1 Solenoid Valve) to the
feedthrough air line. The fitting adapter is available from INFICON for feedthroughs
not equipped with this adapter.
Follow the steps below:
1 Ensure that the O-ring is in the groove on the bolt.
2 Insert the 2.54 cm (1 in.) bolt such that the hexagonal shaped end of the bolt is
on the vacuum side of the chamber.
3 Add the solenoid valve bracket to the bolt threads.
4 Add the washer.
5 Add the feedthrough nut.
6 Tighten the feedthrough nut.
7 Remove the quick disconnect air fitting from the exhaust port of the
solenoid valve and thread it into the fitting adapter (PN 007-133) installed
on the feedthrough air line.