INFICON Front Load Single Sensor - Manual (Page 65)

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Front Load Single and Dual Sensors Operating Manual
Chapter 4
Maintenance and Spare Parts
4.1 General Precautions
CAUTION
Wear clean nylon or talc-free latex lab gloves when
handling sensor components. If sensor components
become contaminated, clean them thoroughly using a
suitable solvent to avoid outgassing under vacuum.
4.1.1 Handle the Crystal with Care
The crystal surfaces are easily contaminated; handle the crystals only by their
edges, and always use clean nylon lab gloves when handling crystal holders and
retainers and clean Teflon tweezers when handling crystals. If using a vacuum
pencil to handle crystals, be sure the vacuum pencil tip is clean and not
contaminated.
Contamination can lead to poor film adhesion. Poor film adhesion will result in high
rate noise and premature crystal failure.
CAUTION
Do not use metal tweezers to handle crystals.
Metal tweezers may chip the edge of the crystal.
4.1.2 Use the Optimum Crystal Type
Silver crystals are recommended for sputtering and other applications with
sustained high heat loads.
Certain materials, especially dielectrics, may not adhere strongly to the crystal
surface and may cause erratic readings. For many dielectrics, adhesion is
improved by using alloy crystals.
Gold is preferred for other applications. Contact INFICON for crystal material
electrode recommendations for a specific evaporant application (refer to
section
1.3 on page 1-2 ).