INFICON Front Load Single Sensor - Manual (Page 25)

1 - 15
PN
07
4-
15
6N
Front Load Single and Dual Sensors Operating Manual
1.6.2 Materials
Body and Holder . . . . . . . . . . . . . . . 304 stainless steel
Springs, Electrical Contacts . . . . . . . Au plated Be-Cu
Water Tubes and Air Tube . . . . . . . . 304 stainless steel
In-Vacuum Cable . . . . . . . . . . . . . . . Silver coated copper, Teflon insulated
Electrical Connector . . . . . . . . . . . . . Glass insulated
Insulators . . . . . . . . . . . . . . . . . . . . . >99% Al
2
O
3
Other Mechanical Parts . . . . . . . . . . 304 or 18-8 stainless steel
Braze . . . . . . . . . . . . . . . . . . . . . . . . Vacuum process high temperature
Ni-Cr alloy
1.6.3 Installation Requirements
Feedthrough . . . . . . . . . . . . . . . . . . . Three pass tubes (two water and one air)
4.8 mm (3/16 in.) OD tubing with two
Microdot coax connectors
(see
section 1.8.3 on page 1-25 )
Vacuum tight braze or weld joint or
connectors for the water tubes
(welded connections or connections using
Ultra-Torr® O-ring compression fittings may
be provided by INFICON if
sensor/feedthrough combination is
ordered, see
Figure 1-3 on page 1-5 )
Other . . . . . . . . . . . . . . . . . . . . . . . . Two XIUs or oscillators designed to interface
with the deposition controller or one XIU or
oscillator and one CrystalTwo switch
(not compatible with all controllers/monitors)
The cable length from the crystal to the
oscillator should not exceed 101.6 cm
(40 in.) unless a ModeLock instrument is
used. Refer to the controller/monitor
operating manual for cable length limitations.
Solenoid valve assembly for air,
PN 750-420-G1
(see
section 3.1 on page 3-1 )
Water Flow Rate. . . . . . . . . . . . . . . . Minimum water flow 150 to 200 cm
3
/min,
30°C maximum