Brooks Instrument XacTorr CMX160 User Manual
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CONTENTS
_1.0 SAFETY NOTICES
1
_1.1 SAFETY SYMBOLS
1
_1.2 GROUNDING
1
_1.3 EXPLOSIVE ATMOSPHERE
1
_1.4 PART SUBSTITUTIONS AND MODIFICATIONS
1
_1.5 GENERAL SAFETY GUIDELINES
1
_1.5.1Unsafe acts
2
_1.5.2Recommended practices
2
_2.0 DESCRIPTION
3
_2.1 BASIC DESIGN
3
_2.2 HISTORICAL DESIGN
4
_2.3 BROOKS CMX DESIGN
4
_2.4 DESIGN OVERVIEW
5
_2.5 RELAYS
6
_2.6 ZERO OUTPUT BIAS CONTROL
7
_2.7 CMX OPERATING TEMPERATURES
8
_2.8 PRESSURE RANGE SELECTION CRITERIA
9
_2.9 PRODUCT SPECIFICATIONS
10
_2.10 ORDERING SPECIFICATIONS
11
_3.0 INSTALLATION
19
_3.1 CMX MOUNTING CONSIDERATIONS
19
_3.2 PLUMBING SIZE
19
_3.3 USE OF AN ISOLATION VALVE
19
_3.4 MATERIAL EXPOSURE
19
_3.5 MECHANICAL CONNECTION
20
_3.6 ELECTRICAL CONNECTIONS
20
_3.7 DEVICENET CONNECTION
21
_3.8 ELECTRICAL SIGNAL DESCRIPTION
24
_4.0 OPERATION
25
_4.1 OPERATING PRECAUTIONS
25
_4.2 POWER THE CMX
25
_4.3 LED INITIALIZATION SEQUENCE
25
_4.4 DEVICE WARM-UP
26
_4.5 HEATER/TEMPERATURE
26
_4.6 ZEROING THE CMX
27
_5.0 MAINTENANCE and TROUBLESHOOTING
28
_5.1 CALIBRATION
28
_5.2 TROUBLESHOOTING
28
_5.3 CLEANING
28
_5.1 REMOVAL OF CMX
29
_CONTENTS