Brooks, Cmx series – Brooks Instrument XacTorr CMX160 User Manual
Page 3
Installation and Operation Manual
X-VAC-CMX-eng
Part Number: 541B154AAG
January, 2011
Brooks
®
CMX Series
Dear Customer,
We appreciate this opportunity to service your measurement and control requirements with a Brooks Instrument
device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid
low-flow applications. Brooks provides an array of flow measurement and control products for various industries
from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical
instrumentation, semiconductor manufacturing, and more.
The Brooks product you have just received is of the highest quality available, offering superior performance,
reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements
and hostile process environments in mind to provide you with a lifetime of dependable service.
We recommend that you read this manual in its entirety. Should you require any additional information concerning
Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover
of this manual or visit www.BrooksInstrument.com
Yours sincerely,
Brooks Instrument