Brooks Instrument XacTorr CMX160 - Manual (Page 34)

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5.0 MAINTENANCE AND TROUBLESHOOTING
5.1 CALIBRATION
The Brooks CMX has been manufactured, tested and is compliant to all
requirements of the applicable published specifications. All devices used for the
manufacture and test of these instruments have traceability to National Institute
of Standards (NIST) according to ISO 10012-1.
Digital CMs should be calibrated every 6-12 months depending on the
application and actual usage. The following factors may affect calibration and
may require calibration at more frequent intervals:
• Sensor diaphragm has become contaminated with process material
• Improper handling (dropping, misuse, etc.)
If the CMX is suspected to have calibration errors, return the unit to Brooks for
repair/calibration.
5.2 TROUBLESHOOTING
Table 10: Troubleshooting Guide
5.3 CLEANING
Cleaning is NOT recommended by anyone other than authorized Brooks service
personnel as this may cause damage to the device and may void the warranty.
Symptom Possible Cause Action
No output signal No power
Check electrical connection.
Check cable continuity.
Verify power supply outputs.
Check for dents to the enclosure.
Fluctuating Zero
Temperature fluctuations Check for varying temperature sources.
Power supply fluctuations Check power supply regulation.
Fluctuating output signal
Electrical noise
Check power supply regulation.
Verify cable grounding and shields.
Pressure control system Check pressure control system.
Excessive vibration Reduce vibration.
Pressure reading too low
or too high
Zero offset Verify electrical zero at zero pressure.
Power input wrong Verify power voltage levels.
Grounds Check signal and power grounds.
Positive output drift
Chamber outgassing Re-pump system to base pressure.
Leak in chamber Eliminate chamber leak.
Negative drift Chamber pumping down Re-zero sensor after pump-down.
Leaky sensor Return device for repair.
Cannot zero CMX
Not at base pressure Verify chamber is at base pressure.
Temperature not in range Wait for Green READY LED to illuminate.
Improper ground Check signal and power grounds.
Device malfunction Return device for repair.
Orientation
Check or replace calibration position (see
note below).
NOTE: For 1 Torr and sub 1 Torr full scale ranges CMX, the specific mounting orientation for the device is specified for
optimal performance. Model number containing “V” in it stands for vertical mounting. Without letter “V” in model number
implies a horizontal mounting.
5.0
_MAINTENANCE