Copy model number here, Figure 9: ordering specifications 2.0 _description – Brooks Instrument XacTorr CMX160 User Manual
Page 17
p.11
2.10 ORDERING SPECIFICATIONS
*Contact Brooks
Technical Support for
other options
Calibration Orientation
H =
Horizontal - Standard
Calibration Orientation
V =
Vertical (for 1 Torr and all
mTorr Ranges)
Reserved for
Brooks Use
C
M
X
4
5
6
7
8
9
10
11
12
Copy Model Number Here
1
2
3
4
5
6
7
8
9
10
11
12
C
M
X
Code
0=
1=
2=
3=
4=
5=
6=
7=
8=
9=
A=
B=
C=
D=
E=
N=
R=
T=
W=
U=
V=
F=
8 UJR (1/2") female
Right angle 8 UJR (1/2") female 30mm +/- 2mm
Short KF16 flange, (A' dimension = 18mm (7.08")
4 VCR (1/4") female
Reserved
KF16 flange with pre-filter assy (A33355-4001)
Wrapped tube with KF16 flange
Short 8 VCR (1/2") male
Reseved
Long 8 VCR (1/2") measues 2-5/8" +1/16"
from base plate to toroid of gland
KF16 - right angle
Short 8 VCR (1/2") female
8 VCR (1/2") female - right angle
2.750" CF
1" additional to tube stub
KF 25 flange
8 VCR (1/2") female
Mini CF
8 VCO (1/2") female (non-standard length)
Fitting Type
0.5" od tube stub (no fitting)
KF 10 flange
KF 16 flange
Code
1 =
2 =
3 =
4 =
5 =
8 =
L =
R =
Note:
1" additional to tube stub
15-Pin w/Fine/Coarse Compatible Zero Switches,
Pin 13 & Pin 14 configured as Inputs for Unique Remote
Zero Functionality. Indy Standard Firmware
1,2 and 3 are available on CMX45 and CMX100.
1, 3, 4 and 5 are available on CMX160
Connector/Interface
9-Pin "D" Male Connector
15-Pin "D" Male Connector with Process relays
15-Pin w/Fine/Coarse Compatible Zero Switches,
Pin 13 & Pin 14 configured as Outputs.
Indy Standard Firmware
DeviceNet w/Analog 9-Pin "D" Female Connector
15-Pin "D" Sub Connector with 2 Process Relays
and a Temperature in Control Relay
15-Pin "D" Sub Connector with 1 Process Relay,
1 Temperature in Control Relay, and an Overheat
Indicator Relay
Range
100 m Torr
250 m Torr
500 m Torr
1 Torr
2 Torr
5 Torr
10 Torr
20 Torr
50 Torr
100 Torr
500 Torr
1000 Torr
1.33 mbar
2 mbar
5 mbar
10 mbar
100 mbar
500 mbar
1000 mbar
13.33 Pa
33.32 Pa
66.65 Pa
133.3 Pa
266.6 Pa
666.6 Pa
1.333 kPa
P11
2.666 kPa
P12
13.33 kPa
P21
66.66 kPa
P25
133.3 kPa
P31
Code
M11
M25
M50
T01
T02
T05
T11
T12
T15
T21
T25
T31
C01
C02
C05
C11
C21
C25
PX1
PX2
PX5
P01
Conversion
100 m Torr
5 Torr
100 m Torr
250 m Torr
500 m Torr
1 Torr
1000 Torr
C31
100 Torr
500 Torr
10 Torr
20 Torr
P02
2 Torr
P05
Operating Temperature
1 = CMX45 (45°C)
2 = CMX100 (100°C)
3 = CMX160 (160°C)
Figure 9: Ordering Specifications
2.0
_DESCRIPTION