Brooks Instrument XacTorr CMX160 - Manual (Page 32)

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4.4 DEVICE WARM-UP
When an CMX is installed and powered up on a system or tool, the signal output
will be variable for a period of time. Once the temperature profile of the device
reaches a steady-state condition and thermal saturation has occurred, the
variance in the signal output will be negligible.
Table 7: Recommended Ready To Use Times
Ready to Use: - Warm-up completed, flashing Amber LED now Green, signal
output change negligible and repeatable temperatures status signal level at 3.3
VDC.
4.5 HEATER/TEMPERATURE (WARM-UP/READY/FAULT) LED
FUNCTIONALITY
The sensor temperature is precisely controlled via the digital signal processor.
An intuitive tri-color LED is provided to indicate the three temperature states:
Warm-up, Ready to Use, and Fault. The following graph and table relate the
LED status to the actual sensor temperature.
Figure 25: Temperature vs. LED State
Table 8: LED Function Table
Device Temp
Range
Device Pressure
Range
From Cold Condition
(in hours)
45 o C 100m Torr 5
1 Torr - 1000 Torr 3
100 o C 100m Torr 5
1 Torr - 1000 Torr 3
160 o C 100m Torr 5
1 Torr - 1000 Torr 3
LED Indicator
AMBER (Warming Up)
FLASHING AMBER (At temperature but not ready for use)
GREEN (Sensor at temperature and ready to use)
RED (Over Temperature) (Fault)
4.0
_OPERATION