Brooks Instrument XacTorr CMX160 - Manual (Page 25)

p.19
3.0 INSTALLATION
3.1 CMX MOUNTING CONSIDERATIONS
Figure 19: Mounting Orientation
3.2 PLUMBING SIZE
When connecting any CMX to the system chamber, minimize restrictions
between the CMX and chamber to maximize the conductance. This is important
to maintain the response characteristics of the CMX in a dynamic control
system. The following should be considered:
• Tubing Size Diameter
• Tubing Length
3.3 USE OF AN ISOLATION VALVE
The use of an isolation valve will reduce the need to wait for the device to
re-stabilize after each vent to atmosphere. Although not required to protect the
CMX, it is strongly recommended that you use an isolation valve for all CMX with
one Torr and below full scale range.
3.4 MATERIAL EXPOSURE
The process gas needs to be compatible with Inconel and/or 316L stainless
steel. If the process generates by-products that could deposit inside the CMX, a
heated device should be used to reduce this deposition.
A b cd ef g
NO
A b cd ef g
Ab cd efg
Ab cde fg
CAUTION ! !
Minimize vibration around the
CMX to eliminate output electri-
cal noise and provide a longer
instrument life. Mount the CMX
away from direct sunlight, heat-
ing/cooling system ducts, gas
vents, and other sources of
temperature variation.
CAUTION ! !
For an CMX with full scale 01
Torr or less, the mounting ori-
entation for the device is speci-
fied for optimal performance.
Horizontal mounting should be
used unless there is a “V” (ver-
tical mounting) in the model
number.
CAUTION ! !
The tubing between the CMX
and the system chamber must
be of equal or greater internal
diameter than the CMX inlet
tube.
CAUTION ! !
The tubing between the CMX
and the system chamber must
be as short as possible, with
the maximum length no longer
than 152 mm [6”].
3.0
_INSTALLATION