Brooks Instrument GF81 - Manual (Page 7)

1-1
Brooks ® GF40/GF80/GF81 Devices
Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
June, 2013 Section 1 Introduction
1-1 Introduction
Based upon Brooks award-winning GF100 Series, the GF40/GF80/GF81
Series is a performance/value MFC platform designed for OEM
applications, delivering the following class leading features:
• MultiFlo™ process gas and flow range programmability, enabling
customers to re-configure the MFC for new gases and full scale flow
rates for unparalleled process flexibility.
• A high-performance, corrosion-resistant flow measurement sensor
delivers improved reproducibility and stability.
• Elastomer (GF40) and metal seal (GF80/GF81) options enable custom-
ers to select the optimum and most cost effective mix of products for
their application.
• Full range of industrial communication protocols (DeviceNet, Profibus
DP-V1, and EtherCAT).
• An independent service/diagnostic port enables on-tool reconfiguration/
optimization, data logging, and troubleshooting without having to
remove the MFC from the gas line.
Figure 1-1 GF40/GF80 Series MultiFlo TM Capable Digital Thermal Mass Flow Devices
1-2 How to Use This Manual
This manual is intended to provide the user with all the information
necessary to install, operate, troubleshoot and maintain these thermal
mass flow devices. The manual is organized in the following sections:
Section 1 Introduction
Section 2 Installation
Section 3 Operation
Section 4 Maintenance and Troubleshooting
Section 5 Product Description Code
Appendix A GF40/GF80 Series Gas Table
Appendix B GF40/GF80/GF81 Series Patents
Appendix C Essential Instructions
Warranty, Local Sales/Service Contact Information
It is recommended that this manual be read in its entirety before attempting
to operate or repair these devices.